Supply Furunde brand FRD-233 diffusion furnace body
/, - It can completely replace the imported furnace body, high-quality heating furnace wire, imported insulation materials, and adopts foreign advanced processing technology. The furnace body can be used at high temperatures for a long time, processing silicon wafers under inches, and the working temperature is ℃-℃.
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, Equipment features:
/, - Multiple process curves can be saved and multiple steps can be set for each curve Automatic operation control function of the process curve The function can be forced to jump to the next process step during the process The function can be paused/continued during automatic operation Multiple sets of parameters can be stored for system operation to call the function > ,
Parameter self-tuning function Process gas program control function All key components have high reliability Have good human-machine interface System Fault self-diagnosis function Breakpoint continuation function after power outage, etc. With history recording function With multi-point temperature compensation, Technical indicators:
Configurable process tube outer diameter ~ inches Configurable process tube quantity: ~ tube/station Working temperature range: ~ 3℃ Constant temperature zone length and accuracy :~ ~3℃.℃ Single point temperature stability: ~3℃.℃/ Maximum controllable heating rate: ℃/ Maximum cooling rate: ℃
